Lithography Tools
| Tool | Function | Subfield | Type | Facility |
|---|---|---|---|---|
| AB-M Contact Aligner | Lithography | All Lithography |
UV | MMF |
| Brewer Cee 100CB | Lithography | All Lithography | Resist Processing | MMF |
| EMS Hotplate | Lithography | All Lithography | Resist Processing | MMF |
| Solvent/Headway Spinner Bench |
Lithography | All Lithography | Resist Processing | MMF |
| YES III Vapor Prime Oven | Lithography | All Lithography | Other | MMF |
Contacts
If you are interested in using any of these tools, please email the facility that the tool falls under. A member of said facility will get back to as soon as possible.
Facility
Email
Center for Biofilm Engineering (CBE)
Imaging and Chemical Analysis Laboratory (ICAL)
Montana Microfabrication Facility (MMF)
Proteomics, Metabolomics, Mass Spectrometry Facility (Mass Spec)
cryo-EM/TEM
Sample prepLab
MonArk Quantum Foundry
