Etching Tools

Tool	Function	Subfield	Type	Facility
Acid Process Wetbench	Etching	Wet	Wet Bench	MMF
Base Process Wetbench	Etching	Wet	Wet Bench	MMF
Harrick HP-001 High Power Plasma Cleaner	Etching	Dry	Plasma	MMF
March 1703	Etching	Dry	RIE	MMF
Oxford ICP	Etching	Dry	ICP	MMF
Oxidation Diffusion Wetbench	Etching	Wet	Wet Bench	MMF

Contacts

If you are interested in using any of these tools, please email the facility that the tool falls under. A member of said facility will get back to as soon as possible.