Thin Film Processing
| Tool | Function | Subfield | Type | Facility |
|---|---|---|---|---|
| Amod Evaporator | Thin Film Processing | Metal | Evaporation | MMF |
| Angstrom Sputter System | Thin Film Processing | Metal | Sputter | MMF |
| ATV PEO 603 | Thin Film Processing | Dielectric | Oxidation | MMF |
| Modulab Evaporator | Thin Film Processing | Metal | Evaporation | MMF |
| MRL boron diffusion | Thin Film Processing | Dielectric | Doping | MMF |
| MRL Oxidation | Thin Film Processing | Dielectric | Oxidation | MMF |
| Phosphorous diffusion | Thin Film Processing | Dielectric | Doping | MMF |
Contacts
If you are interested in using any of these tools, please email the facility that the tool falls under. A member of said facility will get back to as soon as possible.
Facility
Email
Center for Biofilm Engineering (CBE)
Imaging and Chemical Analysis Laboratory (ICAL)
Montana Microfabrication Facility (MMF)
Proteomics, Metabolomics, Mass Spectrometry Facility (Mass Spec)
cryo-EM/TEM
Sample prepLab
