Base Process Wetbench
Description
Containing a TMAH bulk etch pot and an alkaline based resist developer.
Montana Nanotechnology Facility
Montana State University
P.O. Box 173780
Bozeman, MT 59717-3780
Containing a TMAH bulk etch pot and an alkaline based resist developer.
Montana State University
P.O. Box 173780
Bozeman, MT 59717-3780