Features

  • Unique in ways such as in-situ alignment system (X,Y,Z & θ)
  • 1-5 micron alignment accuracy depending on options & wafers
  • automatic PC control & data acquisition
  • application of high voltage up to 2.5KV
  • temperatures up to 560 degrees C
  • forces up to 25,000N
  • self-contained dry pumping system for cacuum up to up to 10-6 mBar range
  • forced nitrogen cooling
  • 3"-6"wafers.