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Tool

Function

Subfield

Type

Facility

2D quantum materials pipelines (2D-QMaPs)

Robotic exfoliation, flake hunting & stacking.

Device fabrication

Characterization

The 2D-QMaPs in development will provide automated capabilities that unite and accelerate the three primary stages of sample preparation and device fabrication for 2D quantum materials research.

 Other

MonArk Quantum Foundry

AB-M Contact Aligner

Lithography

All
Lithography

UV

MMF

Acid Process Wetbench

Etching

Wet

Wet Bench

MMF

Agilent 6520 Q-TOF with Agilent 1100 nano-HPLC

Metrology/
Characterization

Chemical Analysis

Mass Spec

Mass
Spec

Agilent 6538 Q-TOF with Agilent 1290 UHPLC

Metrology/
Characterization

Chemical Analysis

Mass Spec

Mass Spec

Allied High Tech MetPrep 3 grinder-polisher

Sample Prep

N/A

Grinding/Polishing

Sample prepLab

Allied High Tech Multiprep grinder-polisher

Sample Prep

N/A

Grinding/Polishing

Sample prepLab

Allied High Tech TechCut 4 precision low-speed saw

Sample Prep

N/A

Cutting

Sample prepLab

Ambios XP2

Metrology/
Characterization

Structure or Device

Profilometry

MMF

Amod Evaporator

Thin Film Processing

Metal

Evaporation

MMF 

Angstrom Sputter System

Thin Film Processing

Metal

Sputter

MMF

Atomic Force Microscope

Imaging

All Imaging

Probe

ICAL

ATV PEO 603

Thin Film Processing

Dielectric

Oxidation

MMF

AWB04 Wafer Bonder

Packaging

All Packaging

Bonding

MMF

Base Process Wetbench

Etching

Wet

Wet Bench

MMF

Bruker Autoflex

Metrology/
Characterization

Chemical Analysis

Mass Spec

Mass Spec

Bruker D8 Advance Powder X-ray Diffractometer

Metrology/ Characterization

Thin Film

PXD

ICAL

Bruker maXis Impact with Dionex 3000 nano-UHPLC

Metrology/
Characterization

Chemical Analysis

Mass Spec

Mass Spec

Bruker micrOTOF with
Agilent 1290 UHPLC

Metrology/
Characterization

Chemical Analysis

Mass Spec

Mass Spec

Buehler Vibromet vibratory polisher

Sample Prep

N/A

Polishing

Sample prepLab

Cameca ION TOF IV

Metrology/ Characterization

Thin Film

SIMS

ICAL

Confocal Scanning Laser Microscopes, 1 upright, 1 inverted

Imaging

All Imaging

Confocal

CBE

Crest Ultrasonic Cleaner

Cleaning

All Cleaning

Other

MMF

Critical Point Dryer

Biological

All Biological

Other

ICAL

Elemental Scientific Lasers-NWR 193 System

Metrology/ Characterization

Chemical Analysis

Mass Spec

Mass Spec

EMS Hotplate

Lithography

All Lithography

Resist Processing

MMF

Epifluorescence Optical Microscope

Imaging

All Imaging

Optical

ICAL

Field Emission Scanning Electron Microscope

Imaging

All Imaging

SEM

ICAL

Filmetrics F20

Metrology/
Characterization

Structure or Device

Optical

MMF

Filmetrics Profilm 3D optical profilometer

Metrology/ Characterization

Structure or Device

Optical

MMF

Flacktek DAC 330-100 SE Model Mixer

R&D Iteration

SpeedMixer

Other

MMF

Gaertner L116C ellipsometer

Metrology/
Characterization

Structure or Device

Optical

MMF

GC-MS Agilent

Metrology/
Characterization

Chemical Analysis

Chromatography

Mass

Spec

Harrick HP-001 High Power Plasma Cleaner

Etching 

Dry

Plasma

MMF

Jandel 4-point probe

Metrology/
Characterization

Structure or Device

Electrical

MMF

K&S 4124 Wire Bonder

Packaging

All Packaging

Bonding

MMF

K&S 4523AD Wedge Bonder

Packaging

All Packaging

Bonding

MMF

Leica CM1800

Biological

All Biological

Sample Prep

TEM

March 1703

Etching

Dry

RIE

MMF

Modulab Evaporator

Thin Film Processing

Metal

Evaporation

MMF

Lindberg/Blue boron diffusion furnace

Thin Film Processing

Dielectric

Doping

MMF

MRL Oxidation

Thin Film Processing

Dielectric

Oxidation

MMF

Nano Optical Microscope

Imaging

All Imaging

Optical

MonArk Quantum Foundry

Nanospec 3000

Metrology/
Characterization

Structure or Device

Optical

MMF

Nikon Eclipse E-800
(2 units)

Imaging

All Imaging

Optical

CBE

Nikon LV150

Metrology/
Characterization

Structure or Device

 Optical

MMF

Nikon SMZ-1500

Imaging

All Imaging

Optical

CBE

Oxford ICP

Etching

Dry

ICP

MMF

Oxidation Diffusion Wetbench

Etching

Wet

Wet Bench

MMF

Pella Carbon Coater

Sample Prep

SEM

Coater

ICAL

Phosphorous diffusion

Thin Film Processing

Dielectric

Doping

MMF

PVA TePla Ion 10

Cleaning

All Cleaning

Plasma/Stripper

MMF

Quantum Optical Spectroscopy

Metrology/Characterization

All Imaging

Optical

MonArk Quantum Foundry

Scanning Auger
Electron Microprobe

Metrology/
Characterization

Thin Film

Other

ICAL

Scanning Electron
Microscope

Imaging

All Imaging

SEM

ICAL

Solvent/Headway
Spinner Bench

Lithography

All Lithography

Resist Processing

MMF

Talos Arctica

Imaging

Biological Imaging

TEM

cryo-EM

Tecnai Spirit TEM

Imaging

All Imaging

TEM

cryo-EM

Time-of-Flight Secondary
Ion Mass Spectrometer

Metrology/
Characterization

Thin Film

SIMS

ICAL

Transmission Electron Microscope

Imaging

All Imaging

 TEM

TEM

Vitrobot Mk. IV

Sample Prep

Biological/Molecular Analysis

Sample Prep

cryo-EM

Waters Synapt G2S-i Q-TOF with ion mobility

Metrology/
Characterization

Chemical Analysis

Mass Spec

Mass Spec

Waters Synapt XS Ion mobility/Time-of-Flight Mass Spectrometer

Metrology/ Characterization

Chemical Analysis

Mass Spec

Mass Spec

Wild

Metrology/
Characterization

Structure or Device

Optical

MMF

X-ray Photoelectron Spectrometer

Metrology/
Characterization

Thin Film

XPS

ICAL

X-ray Powder Diffraction Spectrometer

Metrology/
Characterization

Thin Film

XRD

ICAL

YES III Vapor Prime Oven

Lithography

All Lithography

Other

MMF

Zeiss Field Emission SEM

Imaging

All Imaging

SEM

ICAL

Zeta Potential Analyzer

Particle

All Particle

Zeta Potential

ICAL 

Contacts

If you are interested in using any of these tools, please email the facility that the tool falls under. A member of said facility will get back to as soon as possible.


Facility 


Email

 

Center for Biofilm Engineering (CBE)

 

Imaging and Chemical Analysis Laboratory (ICAL)

 

Montana Microfabrication Facility (MMF)

 

Proteomics, Metabolomics, Mass Spectrometry Facility (Mass Spec)

 

cryo-EM/TEM

 

Sample prepLab 

MonArk Quantum Foundry